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Selective area epitaxy of III-V nanostructure arrays and networks: Growth, applications, and future directions

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APPLIED PHYSICS REVIEWS
卷 8, 期 2, 页码 -

出版社

AIP Publishing
DOI: 10.1063/5.0044706

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资金

  1. National Natural Science Foundation of China [61974166, 61874141, 61974138, 62005222, 11904399, 92065106]
  2. Youth Innovation Promotion Association, Chinese Academy of Sciences [2017156]
  3. Australian Research Council
  4. State Key Laboratory of High Performance Computing of China [201901-09]

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Selective area epitaxy (SAE) is a promising technique for growing highly uniform III-V nanostructure arrays in a controllable manner, with applications in photonics, electronics, optoelectronics, and quantum science. However, there are current challenges and opportunities discussed in utilizing SAE.
Selective area epitaxy (SAE) can be used to grow highly uniform III-V nanostructure arrays in a fully controllable way and is thus of great interest in both basic science and device applications. Here, an overview of this promising technique is presented, focusing on the growth fundamentals, formation of III-V nanowire arrays, monolithic integration of III-V nanowire arrays on silicon, the growth of nanowire heterostructures, and networks of various shapes. The applications of these III-V nanostructure arrays in photonics, electronics, optoelectronics, and quantum science are also reviewed. Finally, the current challenges and opportunities provided by SAE are discussed.

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