期刊
MICROMACHINES
卷 12, 期 7, 页码 -出版社
MDPI
DOI: 10.3390/mi12070756
关键词
silicon carbide; superjunction; breakdown voltage; specific on-resistance; MOSFET; 4H-SiC
类别
资金
- National Chung-Shan institute of science & technology, Taiwan, R.O.C. [NCSIST-403-V307 (110)]
- Advanced Research Center for Green Materials Science and Technology of National Taiwan University, Taiwan, R.O.C. [110L9006]
- Ministry of Science and Technology, Taiwan, R.O.C. [MOST-109-2218-E-002-033, 110-2823-8-002-001, 110-2218-E-194-007, 110-2524-F-002-043]
This research proposes a novel 4H-SiC power device structure called different concentration floating superjunction MOSFET (DC-FSJ MOSFET), which has a higher breakdown voltage and lower forward specific on-resistance compared to traditional vertical MOSFET. By optimizing the depth, concentration, and thickness of the floating P-type structure, DC-FSJ MOSFET achieves a breakdown voltage over 3300V and reduced R-on,R-sp. Additionally, the Baliga Figure of Merit (BFOM) of DC-FSJ MOSFET increases by 27% and R-on,R-sp is 25% less than traditional vertical MOSFET under the same conditions.
This research proposes a novel 4H-SiC power device structure-different concentration floating superjunction MOSFET (DC-FSJ MOSFET). Through simulation via Synopsys Technology Computer Aided Design (TCAD) software, compared with the structural and static characteristics of the traditional vertical MOSFET, DC-FSJ MOSFET has a higher breakdown voltage (BV) and lower forward specific on-resistance (R-on,R-sp). The DC-FSJ MOSFET is formed by multiple epitaxial technology to create a floating P-type structure in the epitaxial layer. Then, a current spreading layer (CSL) is added to reduce the R-on,R-sp. The floating P-type structure depth, epitaxial layer concentration and thickness are optimized in this research. This structure can not only achieve a breakdown voltage over 3300 V, but also reduce R-on,R-sp. Under the same conditions, the Baliga Figure of Merit (BFOM) of DC-FSJ MOSFET increases by 27% compared with the traditional vertical MOSFET. R-on,R-sp is 25% less than that of the traditional vertical MOSFET.
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