4.7 Article

Simple and cost-effective microfabrication of flexible and stretchable electronics for wearable multi-functional electrophysiological monitoring

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SCIENTIFIC REPORTS
卷 11, 期 1, 页码 -

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NATURE PORTFOLIO
DOI: 10.1038/s41598-021-94397-w

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资金

  1. National Research Foundation of Korea, (NRF) - Korea government (MSIT) [2019R1F1A1063198]
  2. Korea Hydro & Nuclear Power Co. Ltd. [2018-TECH-03]
  3. BK21 FOUR, Korean Southeast Center for the 4th Industrial Revolution Leader Education
  4. National Research Foundation of Korea [2019R1F1A1063198] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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The study proposes a simple, rapid, cost-effective, and complete microfabrication process for flexible and stretchable sensor platforms, including conductor formation and patterning, as well as encapsulation and opening of sensing windows. This method can stably create microscale features suitable for various wearable applications.
The fabrication of flexible and stretchable electronics is a critical requirement for the successful application of wearable healthcare devices. Although such flexible electronics have been commonly fabricated by microelectromechanical system (MEMS) technologies, they require a specialised equipment for vacuum deposition, photolithography, and wet and dry etching. A photolithography-free simple patterning method using a desktop plotter cutter has been proposed; however, the metal formation and electrode opening still rely on the MEMS technology. To address this issue, we demonstrate a simple, rapid, cost-effective, and a complete microfabrication process for flexible and stretchable sensor platforms encompassing conductor formation and patterning to encapsulate and open sensing windows, which only require an economic plotter cutter and readily available supplies. Despite its simplicity, the proposed process could stably create microscale features of 200 mu m wide conductor lines and 1 mm window openings, which are in the useful range for various wearable applications. The feasibility of the simple fabrication of multi-functional sensors for various physiological monitoring applications was successfully demonstrated in electrochemical (glucose), electrical (electrocardiogram), mechanical (strain), and thermal (body temperature) modalities.

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