Fabrication of a Micron-Scale Three-Dimensional Single Crystal Diamond Channel Using a Micro-Jet Water-Assisted Laser

Two types of a trench with conventional vertical and new reverse-V-shaped cross-sections were fabricated on single crystal diamond (SCD) substrate using a micro-jet water-assisted laser. In addition, a microwave plasma chemical vapor deposition device was used to produce multiple micrometer-sized channels using the epitaxial lateral overgrowth technique. Raman and SEM methods were applied to analyze both types of growth layer characterization. The hollowness of the microchannels was measured using an optical microscope. According to the findings, the epitaxial lateral overgrowth layer of the novel reverse-V-shaped trench produced improved SCD surface morphology and crystal quality.

Automated summary

This study fabricated two types of trenches with conventional vertical and new reverse-V-shaped cross-sections on single crystal diamond (SCD) substrate using a micro-jet water-assisted laser and microwave plasma chemical vapor deposition device. Raman and SEM methods were applied to analyze the growth layer characterization of both types. The findings showed that the epitaxial lateral overgrowth layer of the novel reverse-V-shaped trench improved the surface morphology and crystal quality of SCD.