4.5 Article

Broadband Antireflection Coatings Made of Resonant Submicron- and Micron-Sized SiGe Particles Grown on Si Substrates

期刊

IEEE PHOTONICS JOURNAL
卷 13, 期 3, 页码 -

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JPHOT.2021.3081100

关键词

Thin film coatings; optical properties of photonic materials; metamaterials; fabrication and characterization; numerical simulation; FDTD method

资金

  1. Ministry of Science and Higher Education of the Russian Federation [075-15-2020-797 (13.1902.21.0024)]

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By using the solid-state dewetting phenomenon, submicron- and micron-sized SiGe particle arrays were obtained on Si(100) substrates. These arrays exhibit resonance effects in broad infrared spectral ranges, and possess a broadband antireflection property due to wide particle size distributions and the influence of a high-index substrate. The natural formation of particle arrays through dewetting proved to be effective as antireflection coatings.
The solid-state dewetting phenomenon was used to obtain submicron- and micron-sized SiGe particle arrays by the Ge deposition on Si(100) substrates. Their transmission and reflection spectra were measured and numerically modeled by the FDTD method. They exhibit resonance effects in broad infrared spectral ranges, depending on the particle size. The broadband antireflection property is associated with wide particle size distributions and the influence of a high-index substrate. The results show that the dewetting phenomenon provides the natural formation of arrays of particles shaped as close to a sphere segment, and they turned out to be effective as antireflection coatings.

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