4.7 Article Proceedings Paper

Nb-C thin films prepared by DC-MS and HiPIMS: Synthesis, structure, and tribomechanical properties

期刊

SURFACE & COATINGS TECHNOLOGY
卷 422, 期 -, 页码 -

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2021.127569

关键词

Physical vapor deposition; Sputtering; Nanocomposites; Nb-C films; HiPIMS

资金

  1. La Caixa Foundation
  2. Secretaria d'Universitats i Recerca (SUR) del Departament d'Empresa i Coneixement (DEC) de la Generalitat de Catalunya
  3. Fons Socials Europeus [2019FI_B01190, 2020FI_B100114]

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Nanostructured Nb-C thin films were prepared by DC-MS and HiPIMS, with different microstructures and hardness values observed. The formation of lubricating carbon tribofilm during wear tests was observed, particularly on samples prepared by HiPIMS with higher carbon content.
Nanostructured Nb-C thin films were prepared by direct current magnetron sputtering (DC-MS) and high-power impulse magnetron sputtering (HiPIMS). The films were characterized in depth by X-ray diffraction (XRD), grazing incidence X-ray diffraction, scanning electron microscopy, atomic force microscopy, electron probe microanalysis, and Raman spectroscopy. The mechanical properties were measured by nanoindentation, and the tribological properties were measured by pin-on-disk tests in ambient air. The wear tracks and ball scars were analyzed by Raman spectroscopy to elucidate the tribochemical reactions that occurred at the contact area and to determine the wear mechanism for each specimen type. The thermal stability of the coatings was studied up to 1000 degrees C using Raman spectroscopy and XRD. The samples prepared by DC-MS were very dense, and the phase composition changed from purely nanocrystalline (Nb2C and NbC) to a mixture of NbC crystals embedded in an amorphous carbon-based matrix (NbC/a-C(:H)). However, the samples prepared by HiPIMS developed a marked columnar morphology with a NbC/a-C(:H) nanocomposite structure. The hardness values ranged from 11 to 20 GPa depending on the deposition technique and the amount of the soft a-C(:H) phase present in the sample. The tribological properties of all the coatings were remarkably good when the carbon content was approximately 50 at.%. The formation of a lubricating sp(2)-rich C tribofilm between the ball and coating during the pin-on-disk tests was observed by Raman spectroscopy. The tribofilm formed preferentially on the samples prepared by HiPIMS, which had higher C contents. At 750 degrees C, the degradation of the NbC phases resulted in the formation of an additional a-C phase and niobium oxides.

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