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Micro-Nano Processing of Active Layers in Flexible Tactile Sensors via Template Methods: A Review

期刊

SMALL
卷 17, 期 41, 页码 -

出版社

WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.202100804

关键词

artificial intelligence; micro-nano processing; micro-nano structure; sensing array; tactile sensors; template method

资金

  1. National Natural Science Foundation of China [61805101, 62005095, 61625404, 62022079, 61604060]
  2. Shandong Provincial Natural Science Foundation of China [ZR2019BF013, ZR2018BF025, ZR2020QF105]
  3. Shandong Province Key Research and Development Program [2019RKB01023]

向作者/读者索取更多资源

Template methods are considered crucial for micro-nano processing in the active layer of flexible tactile sensors, enhancing properties like sensitivity and response time. However, the lack of a perfect system for processing and applicable conditions has slowed down the development and commercialization of these sensors. Despite the obstacles, advancements in various disciplines have laid the groundwork for template methods, fueling continuous progress in flexible tactile sensors.
Template methods are regarded as an important method for micro-nano processing in the active layer of flexible tactile sensors. These template methods use physical/chemical processes to introduce micro-nano structures on the active layer, which improves many properties including sensitivity, response/recovery time, and detection limit. However, since the processing process and applicable conditions of the template method have not yet formed a perfect system, the development and commercialization of flexible tactile sensors based on the template method are still at a relatively slow stage. Despite the above obstacles, advances in microelectronics, materials science, nanoscience, and other disciplines have laid the foundation for various template methods, enabling the continuous development of flexible tactile sensors. Therefore, a comprehensive and systematic review of flexible tactile sensors based on the template method is needed to further promote progress in this field. Here, the unique advantages and shortcomings of various template methods are summarized in detail and discuss the research progress and challenges in this field. It is believed that this review will have a significant impact on many fields of flexible electronics, which is beneficial to promote the cross-integration of multiple fields and accelerate the development of flexible electronic devices.

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