期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 328, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2021.112768
关键词
Lorentz-force magnetic sensor; Buckling zone; Straight micro-resonators
资金
- King Abdullah University of Science and Technology (KAUST) fund
The miniature highly sensitive wide-range resonant magnetic Lorentz-force micro-sensor demonstrates high sensitivity and low power consumption, making it promising for various low-cost magnetic applications. The device operates based on the detection of resonance frequency of an in-plane electrothermally heated straight resonator near the buckling point, showing a measured sensitivity of 33.9/T with good linearity in low and high magnetic field regimes.
We experimentally demonstrate a miniature highly sensitive wide-range resonant magnetic Lorentz-force micro-sensor. The concept is demonstrated based on the detection of the resonance frequency of an in-plane electrothermally heated straight resonator operated near the buckling point. The frequency shift is measured with optical sensing (laser) and the device is operated at atmospheric pressure. The frequency shift of the micro-sensor becomes very sensitive to any external disturbances around the buckling zone as indicated by the analytical model and experimental data, which show high sensitivity. The magnetometer demonstrates a measured sensitivity (S) of 33.9/T, which is very high compared to the state of the art. In addition, the micro-sensor shows a bi-linear behaviour with good linearity in two magnetic field regimes, low and high, with low power consumption around 0.2 mW. These attractive features make the proposed micro-sensor promising for various low-cost magnetic applications. (c) 2021 Published by Elsevier B.V.
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