相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。A Review on Dielectric Breakdown in Thin Dielectrics: Silicon Dioxide, High-k, and Layered Dielectrics
Felix Palumbo et al.
ADVANCED FUNCTIONAL MATERIALS (2020)
Dielectric nanotomography based on electrostatic force microscopy: A numerical analysis
Rene Fabregas et al.
JOURNAL OF APPLIED PHYSICS (2020)
Subsurface imaging of metal lines embedded in a dielectric with a scanning microwave microscope
Lin You et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2016)
Nanoscale Mapping of Dielectric Properties of Nanomaterials from Kilohertz to Megahertz Using Ultrasmall Cantilevers
Maria J. Cadena et al.
ACS NANO (2016)
Nanoscale dielectric microscopy of non-planar samples by lift-mode electrostatic force microscopy
M. Van der Hofstadt et al.
NANOTECHNOLOGY (2016)
Characterization of Buried Interfaces with Scanning Probe Microscopes
Joseph J. Kopanski et al.
DIELECTRICS FOR NANOSYSTEMS 7: MATERIALS SCIENCE, PROCESSING, RELIABILITY, AND MANUFACTURING (2016)
A scanning microscopy technique based on capacitive coupling with a field-effect transistor integrated with the tip
Kumjae Shin et al.
ULTRAMICROSCOPY (2015)
Specific methodology for capacitance imaging by atomic force microscopy: A breakthrough towards an elimination of parasitic effects
Ivan Estevez et al.
APPLIED PHYSICS LETTERS (2014)
Scanning Probe Microscopes for Subsurface Imaging
Joseph Kopanski et al.
DIELECTRICS FOR NANOSYSTEMS 6: MATERIALS SCIENCE, PROCESSING, RELIABILITY, AND MANUFACTURING (2014)
The stray capacitance effect in Kelvin probe force microscopy using FM, AM and heterodyne AM modes
Zong Min Ma et al.
NANOTECHNOLOGY (2013)
Quantifying the dielectric constant of thick insulators by electrostatic force microscopy: effects of the microscopic parts of the probe
G. Gramse et al.
NANOTECHNOLOGY (2012)
Quantifying the dielectric constant of thick insulators using electrostatic force microscopy
L. Fumagalli et al.
APPLIED PHYSICS LETTERS (2010)
Calibrated nanoscale capacitance measurements using a scanning microwave microscope
H. P. Huber et al.
REVIEW OF SCIENTIFIC INSTRUMENTS (2010)
Nanoscale capacitance microscopy of thin dielectric films
G. Gomila et al.
JOURNAL OF APPLIED PHYSICS (2008)
V-shaped metal-oxide-semiconductor transistor probe with nano tip for surface electric properties
Sang H. Lee et al.
ULTRAMICROSCOPY (2008)
Dielectric-constant measurement of thin insulating films at low frequency by nanoscale capacitance microscopy
Laura Fumagalli et al.
APPLIED PHYSICS LETTERS (2007)
Scanning capacitance microscopy for thin film measurements
DT Lee et al.
NANOTECHNOLOGY (2006)
Thickness determination of thin and ultra-thin SiO2 films by C-AFM IV-spectroscopy
W Frammelsberger et al.
APPLIED SURFACE SCIENCE (2006)
Recent developments in nanofabrication using focused ion beams
AA Tseng
SMALL (2005)
Instrumentation for direct, low frequency scanning capacitance microscopy, and analysis of position dependent stray capacitance
DT Lee et al.
REVIEW OF SCIENTIFIC INSTRUMENTS (2002)