期刊
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
卷 36, 期 8, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6641/ac0b9b
关键词
silicon controlled rectifier (SCR); gate turn-off thyristor (GTO thyristor); supercritical fluid; hydridation
类别
资金
- MOST Taiwan [109-2112-M-110-015-MY3, 108-2923-M-110-005-MY3]
A study applied supercritical fluid treatment to passivate SiC-GTO bulk defects, resulting in an 8% improvement in breakdown voltage without increasing on-state resistance, and suppressing leakage current by over 30% on average. Electrical analysis was used to understand the device characteristics post-treatment and discuss the passivation mechanism.
In the past, gate turn-off (GTO) thyristors were commonly used to either increase the length of the drift region or reduce the doping concentration to increase high-voltage and high-power applications. However, this results in an on-resistance (R (on)) increase. In this study, we applied a supercritical fluid (SCF) treatment to devices which has the advantage of high permeability and low-temperature processing to passivate SiC-GTO bulk defects. After the proposed defect passivation, the breakdown voltage has been improved by 8% without increasing on-state resistance. In addition, the leakage current has also been suppressed more than 30% in average. This study also uses electrical analysis to understand the characteristics of the devices after SCF treatment, and then discusses the passivation mechanism of materials of the devices from this treatment.
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