期刊
PLASMA PROCESSES AND POLYMERS
卷 18, 期 8, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.202000244
关键词
activation energy; macroscopic approach; maleic anhydride; OES; PECVD
资金
- Institut Carnot MICA
- ANRT [2017/0966]
The study investigates the growth kinetics of low-pressure pulsed plasma polymerization of maleic anhydride using a macroscopic approach, identifying three growth regimes. Chemical characterization and spectroscopic analysis suggest a combined spatial and temporal influence on the plasma polymerization kinetics.
The chemical properties of plasma polymers strongly depend on the operating conditions of plasma polymerization and impact their final application. Low-pressure pulsed plasma polymerization of maleic anhydride was investigated at different positions from the glow discharge in a unique 1-m-long reactor. Based on a macroscopic approach, the growth kinetics of maleic anhydride plasma polymerization was investigated, leading to the identification of three growth regimes. The calculation of apparent activation energies associated with each regime and each position and the chemical characterization of polymer films by X-ray photoelectron spectroscopy and attenuated total reflection-Fourier-transform infrared as well as optical emission spectroscopy analyses of plasma species formed during deposition strongly indicate a combined spatial and temporal influence on the plasma polymerization kinetics.
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