VO2 -based micro-electro-mechanical tunable optical shutter and modulator

VO2-based MEMS tunable optical shutters are demonstrated. The design consists of a VO2-based cantilever attached to a VO2-based optical window with integrated resistive heaters for individual mechanical actuation of the cantilever structure, tuning of the optical properties of the window, or both. Optical transmittance measurements as a function of current for both heaters demonstrates that the developed devices can be used as analog optical shutters, where the intensity of a light beam can be tuned to any value within the range of VO2 phase transition. A transmittance drop off 30% is shown for the optical window, with tuning capabilities greater than 30% upon actuation of the cantilever. Unlike typical mechanical shutters, these devices are not restricted to binary optical states. Optical modulation of the optical window is demonstrated with an oscillating electrical input. This produces a transmittance signal that oscillates around an average value within the range off VO2's phase transition. For an input current signal with fixed amplitude (f(el )= 0.28 Hz), tuned to be at the onset of the phase transition, a transmittance modulation of 14% is shown. Similarly, by modulating the DC-offset, a transmittance modulation of VO2 along the hysteresis is obtained. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Automated summary

VO2-based MEMS tunable optical shutters with unique design for flexible optical modulation have been demonstrated. Optical transmittance can be adjusted using electric current, allowing for modulation of light intensity. Unlike traditional mechanical shutters, these devices offer greater optical tuning capabilities.