4.6 Article

Monolithic integration of multicolor InGaN LEDs with uniform luminescence emission

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OPTICS EXPRESS
卷 29, 期 21, 页码 32826-32832

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OPTICAL SOC AMER
DOI: 10.1364/OE.435871

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  1. NS Nanotech,Inc.

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The demonstration of monolithic integration of multicolor LEDs with highly spatially uniform emission wavelength has been reported. The LEDs exhibit pronounced emission peaks with very narrow spectral linewidth due to the photonic crystal effect. The emission wavelengths show small variations among countless individual nanowire emitters over a sub-mm(2) area region.
We report the demonstration of monolithic integration of multicolor LEDs with highly spatially uniform emission wavelength. LEDs with colors ranging from green to orange are realized in a single selective area epitaxy process, and pronounced emission peak with very narrow spectral linewidth from photonic crystal effect is also achieved simultaneously. The In contents and emission colors are tuned by precisely controlling the nanowire emitter diameter and spacing. The emission wavelengths exhibit small variations of only a few nanometers among countless individual nanowire emitters over a sub-mm(2) area region. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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