期刊
OPTICS EXPRESS
卷 29, 期 21, 页码 33281-33296出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.438350
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资金
- Christian Doppler Forschungsgesellschaft
- Bundesministerium fur Digitalisierung und Wirtschaftsstandort
- Osterreichische Nationalstiftung fur Forschung, Technologie und Entwicklung
- MICRO-EPSILON MESSTECHNIK GmbH \ Co. KG
- ATENSOR Engineering and Technology Systems GmbH
- Technische Universitat Wien Bibliothek
The algorithm presented in this paper can accurately register multiple wavefront segments, suitable for freeform wavefronts, with higher registration precision.
The paper presents an algorithm for the precise registration of multiple wavefront segments containing large misalignment and phase differences. The measurement of a wavefront with huge dynamics or a large aperture size can be carried out in multiple Shack-Hartmann sensor measurements of segments of the wavefront. The registration algorithm is flexible with respect to the shape of the wavefront and can reconstruct a plane as well as divergent wavefronts, making it suitable for freeform wavefronts. The algorithm enables parallel registration of the wavefront segments which is carried out in an iterative manner to compensate for large misalignment errors. A simulative analysis of the proposed algorithm compares its performance to a fast parallel registration (FPR) algorithm and the established iterative closest point (ICP) algorithm. For a sensor misalignment of up to 100 mu m and 3 mrad the algorithm registers a plane and a divergent wavefront with a precision that is a factor 4 and 12 better than the registration precision of the FPR and ICP algorithm. Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License.
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