期刊
OPTICS AND LASERS IN ENGINEERING
卷 141, 期 -, 页码 -出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.optlaseng.2021.106563
关键词
Femtosecond laser processing; Adaptive optics; Neural network
类别
资金
- JSPS KAKENHI [JP18K14142]
- QST
This paper demonstrates an adaptive optics technique based on convolutional neural network for femtosecond laser processing, continuously predicting and compensating aberrations to reduce wavefront error in the system.
A wavefront aberration causes focal spot distortion leading to loss of resolution and efficiency in laser processing. Therefore, aberration compensation is important for ensuring sub-micron resolution in laser processing. In this paper, femtosecond laser processing with adaptive optics based on a convolutional neural network was demonstrated. The aberrations existing in the laser processing system were continuously predicted by the trained network with an update period of 36 ms and was compensated by a liquid crystal spatial light modulator. In the experiment, the neural network-based adaptive optics reduced the wavefront error in the laser processing system to most one-ninth. Furthermore, parallel laser processing by a computer-generated hologram displayed on the spatial light modulator was also demonstrated while dynamically compensating the aberrations in the system.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据