期刊
NANO RESEARCH
卷 15, 期 1, 页码 368-376出版社
TSINGHUA UNIV PRESS
DOI: 10.1007/s12274-021-3485-x
关键词
CdSe; flexible devices; van der Waals epitaxy; molecular beam epitaxy; layer lift-off
类别
资金
- Australian Research Council [FT130101708, DP200103188, DP170104562, LP170100088, LE170100233]
- University of Western Australia
- Australian Research Council [DP200103188] Funding Source: Australian Research Council
The study focuses on van der Waals epitaxy of CdSe thin films on mica substrates and the development of etch-free layer transfer technology for flexible photodetectors. The CdSe thin films demonstrate excellent device performance, making them suitable for full-color imaging.
The demand for future semiconductor devices with enhanced performance and lower cost has driven the development of epitaxial growth of high quality, free-standing semiconductor thin film materials without the requirement of lattice matching to the substrate, as well as their transfer to other substrates and associated device processing technology. This work presents a study on the van der Waals epitaxy based molecular beam epitaxy of CdSe thin films on two-dimensional layered mica substrates, as well as related etch-free layer transfer technology of large area, free-standing layers and their application in flexible photodetectors for full-color imaging. The photoconductor detectors based on these flexible CdSe thin films demonstrate excellent device performance at room temperature in terms of responsivity (0.2 A.W-1) and detectivity (1.5 x 10(12) Jones), leading to excellent full-color imaging quality in the visible spectral range. An etch-free and damage-free layer transfer method has been developed for transferring these CdSe thin films from mica to other substrate for further device processing and integration. These results demonstrate the feasibility of van der Waals epitaxy method for growing high quality, large area, and free-standing epitaxial layers without the requirement for lattice matching to substrate for applications in low-cost flexible and/or monolithic integrated optoelectronic devices.
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