4.8 Article

Uncovering Thermal and Electrical Properties of Sb2Te3/GeTe Superlattice Films

期刊

NANO LETTERS
卷 21, 期 14, 页码 5984-5990

出版社

AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.1c00947

关键词

Sb2Te3/GeTe superlattice; time-domain thermoreflectance; thermal conductivity; electrical resistivity; anisotropy

资金

  1. Semiconductor Research Corporation, SRC [2826.001]
  2. Kwanjeong Educational Foundation Fellowship
  3. Stanford Graduate Fellowship
  4. National Science Foundation [ECCS-2026822]

向作者/读者索取更多资源

The research investigates the electrical and thermal transport properties of superlattice-like phase change memory based on Sb2Te3 and GeTe, revealing interface resistances, coherence transition of phonon transport, and strong anisotropy in electrical resistivity due to weakly interacting van der Waals-like gaps.
Superlattice-like phase change memory (SL-PCM) promises lower switching current than conventional PCM based on Ge2Sb2Te5 (GST); however, a fundamental understanding of SL-PCM requires detailed characterization of the interfaces within such an SL. Here we explore the electrical and thermal transport of SLs with deposited Sb2Te3 and GeTe alternating layers of various thicknesses. We find up to an approximately four-fold reduction of the effective cross-plane thermal conductivity of the SL stack (asdeposited polycrystalline) compared with polycrystalline GST (asdeposited amorphous and later annealed) due to the thermal interface resistances within the SL. Thermal measurements with varying periods of our SLs show a signature of phonon coherence with a transition from wave-like to particle-like phonon transport, further described by our modeling. Electrical resistivity measurements of such SLs reveal strong anisotropy (similar to 2000x) between the in-plane and cross-plane directions due to the weakly interacting van der Waals-like gaps. This work uncovers electrothermal transport in SLs based on Sb2Te3 and GeTe for the improved design of low-power PCM.

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