期刊
NANO LETTERS
卷 21, 期 18, 页码 7746-7752出版社
AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.1c02644
关键词
nanomechanics; thermal motion; electron microscopy; metrology
类别
资金
- UK Engineering and Physical Sciences Research Council [EP/M009122/1, EP/T02643X/1]
- Singapore Ministry of Education [MOE2016-T3-1-006]
- China Scholarship Council [201806160012]
- EPSRC [EP/M009122/1, EP/T02643X/1] Funding Source: UKRI
This technique combines high sensitivity picometric displacement detection with nanometric spatial resolution of electron microscopy, allowing for observation of fast movements of micro-/nano-objects, quantitative validation of nanocantilever’s Brownian motion, and visualization of externally driven modes.
Electron microscopy, scanning probe, and optical super-resolution imaging techniques with nanometric resolution are now routinely available but cannot capture the characteristically fast (MHz-GHz frequency) movements of micro-/nano-objects. Meanwhile, optical interferometric techniques can detect high-frequency picometric displacements but only with diffraction-limited lateral resolution. Here, we introduce a motion visualization technique, based on the spectrally resolved detection of secondary electron emission from moving objects, that combines picometric displacement sensitivity with the nanometric spatial (positional/imaging) resolution of electron microscopy. The sensitivity of the technique is quantitatively validated against the thermodynamically defined amplitude of a nanocantilever's Brownian motion. It is further demonstrated in visualizing externally driven modes of cantilever, nanomechanical photonic metamaterial, and MEMS device structures. With a noise floor reaching similar to 1 pm/Hz(1/2), it can provide for the study of oscillatory movements with subatomic amplitudes, presenting new opportunities for the interrogation of motion in functional structures across the materials, bio- and nanosciences.
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