期刊
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
卷 129, 期 -, 页码 -出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2021.105804
关键词
Solution-gelation (sol-gel); (TiO2); High-electron-mobility transistor (HEMT)
类别
资金
- Ministry of Science and Technology (MOST) of Taiwan [MOST 103-2221-E-214-043, MOST 104-2221-E-214-026, MOST 109-2221-E-006-075-MY2]
The study demonstrated that sol-gel processed TiO2 can be successfully applied to InAlAs/InGaAs MHEMT, enhancing the electrical performance of the devices, showing potential in power applications.
The study investigated titanium dioxide (TiO2) on indium phosphide (InP) prepared by solution-gelation (sol-gel) process and application to InAlAs/InGaAs metal-oxide-semiconductor metamorphic high-electron-mobility transistor (MOS-MHEMT). The sol-gel TiO2 exhibits not only easy process and without plasma source, but also high dielectric constant to improve the interface state between metal and semiconductor. The InAlAs/InGaAs MHEMT with sol-gel processed TiO2 as gate oxide reveals superior electrical characteristics than the reference case. These electrical characteristics include better drain current density, larger turn-on voltage, improved reverse breakdown voltage, as well as smaller gate leakage current density. These results indicate the potentiality of the proposed sol-gel process TiO2 as gate oxide on InAlAs/InGaAs MHEMT for further power application.
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