期刊
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
卷 128, 期 -, 页码 -出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2021.105732
关键词
beta-Ga2O3; Homoepitaxy; Mist chemical vapor deposition; Rapid growth
类别
资金
- JSPS KAKENHI [19H02170]
- Grants-in-Aid for Scientific Research [19H02170] Funding Source: KAKEN
Utilizing mist chemical vapor deposition (CVD) process, rapid homoepitaxial growth of beta-Ga2O3 thin films with smooth surfaces was achieved using a concentrated aqueous solution of GaCl3 precursor.
We achieved rapid homoepitaxial growth of beta-Ga2O3 thin films with smooth surfaces using a mist chemical vapor deposition (CVD) process. A smooth film was grown at a rate of 3.2 mu m/h using a concentrated aqueous solution of the GaCl3 precursor. Homoepitaxial growth of a smooth (010) beta-Ga2O3 thin film was achieved via mist CVD at 750 degrees C, and the growth of beta-Ga2O3 in different orientations was not observed. The GaCl3 precursor was highly soluble in water and enabled the rapid growth of homoepitaxial beta-Ga2O3 thin films with smooth surfaces.
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