期刊
LASER & PHOTONICS REVIEWS
卷 15, 期 8, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/lpor.202100030
关键词
chemomechanical etching; erbium-doped waveguide amplifier; lithium niobate; photolithography; thin film
资金
- National Key R&D Program of China [2019YFA0705000]
- National Natural Science Foundation of China [12004116, 11874154, 11734009, 11933005, 11874060, 61991444]
- Shanghai Municipal Science and Technology Major Project [2019SHZDZX01]
- Fundamental Research Funds for the Central Universities
Utilizing the PLACE technique, on-chip light amplification with integrated optical waveguide fabricated on erbium-doped thin-film lithium niobate on insulator (TFLNOI) was demonstrated with a maximum internal net gain of 18 dB. This work opens the way for the monolithic integration of diverse active and passive photonic components on the TFLNOI platform.
On-chip light amplification with integrated optical waveguide fabricated on erbium-doped thin-film lithium niobate on insulator (TFLNOI) is demonstrated using the photolithography-assisted chemomechanical etching (PLACE) technique. A maximum internal net gain of 18 dB in the small-signal-gain regime is measured at the peak emission wavelength of 1530 nm for a waveguide length of 3.6 cm, indicating a differential gain per unit length of 5 dB cm(-1). This work paves the way to the monolithic integration of diverse active and passive photonic components on the TFLNOI platform.
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