期刊
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
卷 39, 期 4, 页码 -出版社
A V S AMER INST PHYSICS
DOI: 10.1116/6.0000962
关键词
-
资金
- National Science Foundation (NSF) [CBET-1604605]
- State of North Carolina
- NSF [ECCS-1542015, DMR-1726294]
MoO3 films were grown on stepped c-plane sapphire substrates by molecular beam epitaxy, resulting in multilayer growth on surfaces with wide atomically smooth terraces. The morphology of the monocrystalline films strongly suggests multilayer growth.
MoO3 films were grown on stepped c-plane sapphire substrates by molecular beam epitaxy using MoO3 vapor from a conventional Knudsen cell. Stepped sapphire (0001) substrates were prepared by ex situ annealing at 1100-1300 degrees C in dry air. Step bunching typically resulted in multistepped surfaces with wide atomically smooth terraces. Ex situ annealing at 1100 degrees C followed by in vacuo annealing at 700 degrees C provided clean substrates for growth. Ultrathin films were grown at 450 degrees C via a self-limiting process that represents a balance between the incident MoO3 flux and the desorption flux. Elongated bilayer islands (0.7-nm thick) were formed on sapphire (0001) terraces. Monocrystalline alpha-MoO3 (010) thin films [(010)(alpha-MoO3)parallel to(0001)(sapphire)] were grown at 450 degrees C using a higher incident MoO3 flux and characterized by atomic force microscopy, x-ray photoelectron spectroscopy, x-ray diffraction, and cross-sectional transmission electron microscopy. The step-terrace surface morphology of the monocrystalline films strongly suggests multilayer growth.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据