A novel and potentially scalable CVD-based route towards SnO2:Mo thin films as transparent conducting oxides

In this report, we prepared transparent and conducting undoped and molybdenum-doped tin oxide (Mo-SnO2) thin films by aerosol-assisted chemical vapour deposition (AACVD). The relationship between the precursor concentration in the feed and in the resulting films was studied by energy-dispersive X-ray spectroscopy, suggesting that the efficiency of doping is quantitative and that this method could potentially impart exquisite control over dopant levels. All SnO2 films were in tetragonal structure as confirmed by powder X-ray diffraction measurements. X-ray photoelectron spectroscopy characterisation indicated for the first time that Mo ions were in mixed valence states of Mo(VI) and Mo(V) on the surface. Incorporation of Mo-6(+) resulted in the lowest resistivity of 7.3 x 10(-3) Omega cm, compared to pure SnO2 films with resistivities of 4.3(0) x 10(-2) Omega cm. Meanwhile, a high transmittance of 83% in the visible light range was also acquired. This work presents a comprehensive investigation into impact of Mo doping on SnO2 films synthesised by AACVD for the first time and establishes the potential for scalable deposition of SnO2:Mo thin films in TCO manufacturing. [GRAPHICS] .

Automated summary

In this study, transparent and conducting undoped and molybdenum-doped tin oxide thin films were successfully prepared using aerosol-assisted chemical vapour deposition. The doping efficiency was found to be quantitative and could potentially allow precise control over dopant levels. Incorporation of Mo ions led to lower resistivity and high transmittance in the visible light range.