相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。Towards understanding the machining mechanism of the atomic force microscopy tip-based nanomilling process
Jiqiang Wang et al.
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE (2021)
A novel self-aligned double patterning integrated with Ga+ focused ion beam milling for silicon nanowire definition
Andressa Macedo Rosa et al.
MICROELECTRONIC ENGINEERING (2021)
Material removal mechanism of FCC single-crystalline materials at nano-scales: Chip removal & ploughing
Huan Liu et al.
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY (2021)
Batch microfabrication of highly integrated silicon-based electrochemical sensor and performance evaluation via nitrite water contaminant determination
Jiawen Yin et al.
ELECTROCHIMICA ACTA (2020)
Transmission electron microscopy (TEM) study of anisotropic surface damages in micro-cutting polycrystalline aluminate magnesium spinel (PAMS) crystals
Zhuoqi Shi et al.
CERAMICS INTERNATIONAL (2020)
Developing a high-strength Al-Mg-Si-Sc-Zr alloy for selective laser melting: Crack-inhibiting and multiple strengthening mechanisms
Ruidi Li et al.
ACTA MATERIALIA (2020)
Surface and subsurface damage of reaction-bonded silicon carbide induced by electrical discharge diamond grinding
Xiaoshuang Rao et al.
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE (2020)
Review of ultrasonic vibration-assisted machining in advanced materials
Zhichao Yang et al.
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE (2020)
Theoretical modelling of brittle-to-ductile transition load of KDP crystals on (001) plane during nanoindentation and nanoscratch tests
Chen Li et al.
JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T (2020)
Fabrication of Si photonic waveguides by electron beam lithography using improved proximity effect correction
Moataz Eissa et al.
JAPANESE JOURNAL OF APPLIED PHYSICS (2020)
Strain-rate dependence of surface/subsurface deformation mechanisms during nanoscratching tests of GGG single crystal
Chen Li et al.
CERAMICS INTERNATIONAL (2019)
Deformation mechanism and force modelling of the grinding of YAG single crystals
Chen Li et al.
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE (2019)
Nucleation location and propagation direction of radial and median cracks for brittle material in scratching
Xinying Li et al.
CERAMICS INTERNATIONAL (2019)
The 'skin effect' of subsurface damage distribution in materials subjected to high-speed machining
Bi Zhang et al.
INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING (2019)
Ultrasonic vibration mill-grinding of single-crystal silicon carbide for pressure sensor diaphragms
Jian Li et al.
CERAMICS INTERNATIONAL (2018)
Damage formation and suppression in rotary ultrasonic machining of hard and brittle materials: A critical review
Jianjian Wang et al.
CERAMICS INTERNATIONAL (2018)
Development and Characterization of Ultrasonic Vibration Assisted Nanomachining Process for Three-Dimensional Nanofabrication
Jia Deng et al.
IEEE TRANSACTIONS ON NANOTECHNOLOGY (2018)
Influence of strain rate effect on material removal and deformation mechanism based on ductile nanoscratch tests of Lu2O3 single crystal
Chen Li et al.
CERAMICS INTERNATIONAL (2018)
Surface and subsurface damage in ZerodurA® glass ceramic during ultrasonic assisted grinding
Fouad Lakhdari et al.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY (2017)
One-dimensional Si/Ge nanowires and their heterostructures for multifunctional applications-a review
Samit K. Ray et al.
NANOTECHNOLOGY (2017)
Influence of microstructure on the cutting behaviour of silicon
Saurav Goel et al.
ACTA MATERIALIA (2016)
Dislocation-mediated plasticity in silicon during nanometric cutting: A molecular dynamics simulation study
Saeed Zare Chavoshi et al.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2016)
Recent Advances on Luminescent Enhancement-Based Porous Silicon Biosensors
S. N. Aisyiyah Jenie et al.
PHARMACEUTICAL RESEARCH (2016)
AFM-based 3D nanofabrication using ultrasonic vibration assisted nanomachining
Jia Deng et al.
JOURNAL OF MANUFACTURING PROCESSES (2016)
Effects of AFM tip-based direct and vibration assisted scratching methods on nanogrooves fabrication on a polymer resist
Yanquan Geng et al.
APPLIED SURFACE SCIENCE (2015)
Subsurface damage mechanism of high speed grinding process in single crystal silicon revealed by atomistic simulations
Jia Li et al.
APPLIED SURFACE SCIENCE (2015)
Size effect in material removal by cutting at nano scale
Fengzhou Fang et al.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY (2015)
Recent advances in AFM tip-based nanomechanical machining
Yongda Yan et al.
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE (2015)
Diamond machining of silicon: A review of advances in molecular dynamics simulation
Saurav Goel et al.
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE (2015)
Tribochemistry-induced direct fabrication of nondestructive nanochannels on silicon surface
Jian Guo et al.
RSC ADVANCES (2015)
Vibration assisted nano mechanical machining using AFM probe
S. S. Park et al.
CIRP ANNALS-MANUFACTURING TECHNOLOGY (2014)
Prediction of the threshold load of dislocation emission in silicon during nanoscratching
Q. H. Fang et al.
ACTA MATERIALIA (2013)
Material-Insensitive Feature Depth Control and Machining Force Reduction by Ultrasonic Vibration in AFM-Based Nanomachining
Li Zhang et al.
IEEE TRANSACTIONS ON NANOTECHNOLOGY (2013)
Ultrasonic vibration-assisted scratch-induced characteristics of C-plane sapphire with a spherical indenter
Chenglong Zhang et al.
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE (2013)
Experimental study on brittle-ductile transition in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using single diamond abrasive grain
Zhiqiang Liang et al.
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE (2013)
Analysis of ductile mode and brittle transition of AFM nanomachining of silicon
Seoung Hwan Lee
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE (2012)
Rotary Ultrasonic Machining of Alumina Dental Ceramics: A Preliminary Experimental Study on Surface and Subsurface Damages
Yasser Ahmed et al.
JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME (2012)
A calculating method for the fewest cutting passes on sapphire substrate at a certain depth using specific down force energy with an AFM probe
Zone-Ching Lin et al.
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY (2012)
Nanogrinding of multi-layered thin film amorphous Si solar panels
Taro Sumitomo et al.
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE (2011)
Visualization and analysis of atomistic simulation data with OVITO-the Open Visualization Tool
Alexander Stukowski
MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING (2010)
Nanoscratch-induced phase transformation of monocrystalline Si
Y. Q. Wu et al.
SCRIPTA MATERIALIA (2010)
Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining
Jiwang Yan et al.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY (2009)
Nondestructive measurement of machining-induced amorphous layers in single-crystal silicon by laser micro-Raman spectroscopy
Jiwang Yan et al.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY (2008)
MD simulation of dislocation mobility during cutting with diamond tip on silicon
Q. H. Tang
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2007)
Deformation mechanisms of silicon during nanoscratching
R Gassilloud et al.
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE (2005)
Room temperature dislocation plasticity in silicon
AM Minor et al.
PHILOSOPHICAL MAGAZINE (2005)
Elastic, mechanical, and thermal properties of nanocrystalline diamond films
J Philip et al.
JOURNAL OF APPLIED PHYSICS (2003)
分享论文
