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Tianchong Zhang et al.
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Taylor J. Woehl et al.
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Gaspard Pardon et al.
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Han-Bo-Ram Lee et al.
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D. Longrie et al.
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Steven Novak et al.
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Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
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O. Nilsen et al.
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J. W. Elam et al.
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Island growth as a growth mode in atomic layer deposition: A phenomenological model
RL Puurunen et al.
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T Aaltonen et al.
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