期刊
JAPANESE JOURNAL OF APPLIED PHYSICS
卷 60, 期 6, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.35848/1347-4065/ac0418
关键词
Hetero-epitaxial growth; molecular-beam epitaxy; Gallium Oxide; critical layer thickness; Hall-effect measurement
资金
- JSPS KAKENHI [16H06424]
- Asahi Glass foundation
- Grants-in-Aid for Scientific Research [16H06424] Funding Source: KAKEN
The critical layer thickness for (AlGa) (2) O-3 heteroepitaxial growth on beta-Ga2O3 (010) substrates via plasma-assisted molecular beam epitaxy was reported, along with the electrical properties of heavily tin-doped (AlGa) (2) O-3 layers. The aluminum composition in the (AlGa) (2) O-3 layers was reproducibly controlled within 19% by changing aluminum fluxes. Pseudomorphic growth of (Al0.12Ga0.88) (2) O-3 and (Al0.15Ga0.85) (2) O-3 layers of certain thicknesses on beta-Ga2O3 (010) substrates was achieved.
We report on the critical layer thickness for (AlGa)(2)O-3 hetero-epitaxial growth on beta-Ga2O3 (010) substrates via plasma-assisted molecular-beam epitaxy and on the electrical properties of heavily tin-doped (AlGa)(2)O-3 layers. The aluminum composition in the (AlGa)(2)O-3 layers was reproducibly controlled within 19% by changing aluminum fluxes. We achieved the pseudomorphic growth of the 1050 nm thick (Al0.12Ga0.88)(2)O-3 and 420 nm thick (Al0.15Ga0.85)(2)O-3 layers on beta-Ga2O3 (010) substrates. The electron concentration, contact resistivity, and sheet resistance of the (Al0.10Ga0.90)(2)O-3 layer with a tin concentration of 4 x 10(19) cm(-3) were 1 x 10(18) cm(-3), 3 x 10(-5) omega cm(2), and 9 x 10(2) omega/rectangle, respectively.
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