期刊
INFRARED PHYSICS & TECHNOLOGY
卷 115, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.infrared.2021.103736
关键词
THz wave detector; Schottky barrier diode; Zero-bias detection; Reliability test; Hermetic package
资金
- Electronics and Telecommunications Research Institute (ETRI) [20ZH1121, 20ZB1130]
- ICT R&Dprogram of MSIP/IITP [2017000619]
- Ministry of SMEs and Startups (MSS) of the Korean Government [S2524372]
- Ministry of Trade, Industry, and Energy (MOTIE)
- Korea Technology & Information Promotion Agency for SMEs (TIPA) [S2524372] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
A low-barrier Schottky barrier diode with integrated antenna for broadband THz detection, based on an n-InGaAs/n+-InP hetero-epitaxial structure, showed refined and uniform nonlinear rectifying characteristics. A compact and robust hermetic packaged module was fabricated using this device, with stable and consistent electrical characteristics even in mechanical/vibration shock and abrupt temperature changes. The detection performance of the module, characterized by frequency domain spectroscopy system, showed a detectable bandwidth of 0.1-0.8 THz, a voltage responsivity of 320 V/W, and noise equivalent power of 3.1.10-9 W/Hz0.5 at 300 GHz.
We demonstrate on n-InGaAs/n+-InP hetero-epitaxial structure based low-barrier Schottky barrier diode with integrated antenna for broadband THz detection. These devices showed refined and uniform nonlinear rectifying characteristics. Based on this device, a compact and robust hermetic packaged module was fabricated. The developed module showed stable and consistent electrical characteristics even in mechanical/vibration shock and abrupt change of temperature. The detection performance of module was characterized by frequency domain spectroscopy system, and as a result, it had a detectable bandwidth of 0.1-0.8 THz, a voltage responsivity of 320 V/W, and noise equivalent power of 3.1.10-9 W/Hz0.5 at 300 GHz.
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