4.7 Article

The MEMS-Based Electrochemical Seismic Sensor With Integrated Sensitive Electrodes by Adopting Anodic Bonding Technology

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Summary: This study investigated the temperature characteristics of electrochemical seismic sensors based on MEMS and developed temperature compensation circuits to adjust sensitivity coefficients and pole frequencies, achieving real-time temperature compensation. The results showed a significant reduction in sensitivity variation after temperature compensation within a specific temperature and bandwidth range.

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