期刊
IEEE SENSORS JOURNAL
卷 21, 期 18, 页码 19675-19683出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2021.3094034
关键词
Sensors; Temperature sensors; Temperature measurement; Electrodes; Biosensors; Monitoring; Impedance; Amperometric; bioprocesses monitoring; cell density; dissolved oxygen; electrochemical and biological sensors; glucose; impedimetric; integrated multi-sensor; pH; potentiometric; temperature
This paper presents a feasibility study on integrating multiple biosensors on a single chip, including amperometric, potentiometric, and impedimetric detection techniques, as well as physical sensors. The fabricated sensors showed good performance, such as linear working range and fast response time, indicating a promising step towards realizing a real-time measurement platform for bioprocesses.
This paper presents a feasibility study on the integration of multiple biosensors based on amperometric, potentiometric, and impedimetric detection techniques, as well as physical sensors on a single chip. The sensor chip comprises six sensors for in-situ monitoring of important process parameters in a bioprocess: glucose, lactate, pH, cell density, dissolved oxygen concentration, and temperature. The wafer-level parallel fabrication process of multiple microsensors on a single substrate involves four relatively simple processes. The fabricated enzyme sensors were tested with a linear working range up to a concentration of 10 mM for the glucose and lactate sensors and show a fast response time of 20 s. The integrated pH sensor was governed by a near-Nernstian equation with a sensitivity of 60.8 +/- 2.4 mV/pH. Cell density, dissolved oxygen, and temperature sensor were also electrically tested. Results obtained from experimental measurements can be considered a promising step towards the realization of a real-time and parallel in-situ measurement platform for bioprocesses.
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