期刊
IEEE ELECTRON DEVICE LETTERS
卷 42, 期 9, 页码 1331-1333出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2021.3094523
关键词
Low-temperature polysilicon; metal oxide semiconductor; contact resistance; monolithic integration; thin-film transistor; LTPO
资金
- Shenzhen Science and Technology Innovation Committee [SGDX2019081623360954]
- State Key Laboratory of Advanced Displays and Optoelectronics Technologies [ITC-PSKL12EG02]
The incompatibility issues of materials and processes for the monolithic integration of low-temperature polysilicon (LTPS) and amorphous metal-oxide thin-film transistors are addressed by using a stacked-interconnect technique, resulting in low specific contact resistance for both transistors. This approach allows for more consistent transistor characteristics and enables the demonstration of inverters with a gain of 40 V/V and rail-to-rail full swing.
While offering a range of practical benefits, the monolithic integration of low-temperature polysilicon (LTPS) and amorphous metal-oxide thin-film transistors presents several incompatibility issues regarding materials and processes. Presently addressed are two critical ones arising from the back-end processes of contact treatment and metallization. Both are resolved by employing a stacked-interconnect consisting of two conductor layers, with each layer forming the preferred contact electrodes for one of the two types of transistors. At the expense of a slight increase in process complexity, a narrow distribution of low specific contact resistance (similar to 10(-5) Omega.cm(2)) for both types of transistors was obtained, thus giving rise to more consistent transistor characteristics. Inverters consisting of complementary top-gate LTPS pull-up and bottom-gate indium-gallium-zinc oxide pull-down transistors were demonstrated, exhibiting a gain of 40 V/V and a rail-to-rail full swing.
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