期刊
IEEE ELECTRON DEVICE LETTERS
卷 42, 期 6, 页码 784-787出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2021.3074627
关键词
Annealing; Masers; MOSFET; Power lasers; Semiconductor lasers; Lasers; Amorphous silicon; Monolithic 3D; MOSFET; deep ultraviolet laser; low temperature
资金
- National Research Foundation of Korea (NRF) - Ministry of Science and ICT [2020M3F3A2A01082329]
- Inha University Research Fund
- National Research Foundation of Korea [2020M3F3A2A01082329] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
This study successfully utilized deep ultraviolet laser annealing to fabricate upper-layer poly-Silicon devices without degrading the performance of lower-layer devices. By connecting upper and lower layer devices through interlayer vias, a current-starved ring oscillator was formed, showing a reasonable performance improvement in the bottom layer circuits.
Monolithic 3-dimensional integration (M3D) requires heat treatment techniques that should not degrade the device performance of the lower layers when applied to device fabrication in the upper layers. Deep ultraviolet (DUV) laser annealing was implemented in the crystallization of amorphous silicon and source/drain junction activation to fabricate polycrystalline silicon (poly-Si) metal-oxide-semiconductor field-effect-transistors (MOSFETs) for upper-layer devices. The poly-Si MOSFET devices were fabricated successfully on top of the bottom electronic circuit layer (isolated by a thick silicon dioxide layer). Devices on the upper and lower layers were connected through interlayer vias to form a current-starved ring oscillator. The current-to-frequency converter on the bottom layer showed a reasonable increase in frequency as the current of the poly-Si MOSFET on the upper layer increased with increasing silicon grain size, confirming that DUV laser annealing did not degrade the performance of the bottom layer devices. This opens more opportunities for using DUV laser annealing in the M3D integration.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据