4.6 Article

Modeling of the temperature field in nanosecond pulsed laser ablation of single crystalline diamond

期刊

DIAMOND AND RELATED MATERIALS
卷 116, 期 -, 页码 -

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2021.108402

关键词

Nanosecond pulsed laser ablation; Single crystalline diamond; Temperature field modeling; Heat transfer

资金

  1. National Natural Science Foundation of China for Creative Research Groups [51921003]
  2. National Natural Science Foundation of China (NSFC) [:51805257]
  3. Natural Science Foundation of Jiangsu Province [BK20201298]
  4. China Postdoctoral Science Foundation [:2019TQ0151]
  5. Postgraduate Research & Practice Innovation Program of Jiangsu Province [KYCX19_0162]

向作者/读者索取更多资源

This paper develops a comprehensive finite element simulation model to analyze the heat transfer during laser ablation of single crystalline diamond with a Gaussian laser beam. The model shows promising predictive capability for optimizing machining parameters.
In this paper, a comprehensive finite element (FE) simulation model of the heat transfer for laser ablation of a single crystalline diamond (SCD) with a scanning laser beam in Gaussian shape is developed. The model takes into account the material properties, the geometric structure, and the thermal boundary conditions. It is employed to study the dependence of the temperature distribution under varying laser machining parameters. The distribution characteristics of the temperature field, the temperature evolution, and the heat conduction on the diamond surface are obtained, analyzed, and discussed. The law describing the influence of the laser parameters on the temperature field on the diamond surface is established. After comparing the numerically estimated thermal penetration depth of the pulsed laser in the diamond with the experimentally ablated groove characterized by a scanning electron microscope (SEM), a white light interferometer (WLI) and the Raman spectroscopy analysis of the deposited metamorphic layer, it is found that the developed model shows an excellent predictive capability and provides a promising tool for the future optimization of the machining parameters.

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