期刊
APPLIED PHYSICS LETTERS
卷 118, 期 25, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/5.0045845
关键词
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资金
- Ministry of Science and Technology in Taiwan [MOST 109-2112-M-002-028, 109-2622-8-002-003, 109-2811-M-002-685, 105-2112-M-007-014-MY3]
- Taiwan Semiconductor Research Institute [JDP110-Y1-024]
By depositing Y on a pristine p-InAs surface under ultra-high vacuum conditions, the researchers achieved low interfacial trap density, paving the way for effective passivation of p-type InAs and high-performance electronic and optoelectronic InAs devices.
By in situ depositing Y on a pristine p-In As surface under ultra-high vacuum, we have attained a low interfacial trap density (D from the mid-gap to the valence band edge. The D values were extracted from the conductance contours measured from 300 K to 77 K. The small frequency dispersions of 1.2%/dec (300 K) and 0.28%/dec (77 K) in the accumulation region of the capacitance-voltage (CV) characteristics and very small frequency-dependent flatband voltage shifts of 0.021 V/dec (300 K) and 0.011 V/dec (77 K) indicate low border trap densities and low D's; these experimental results have not been achieved in previous reports of oxide/p-In values, small CV frequency dispersions, and an abrupt interface without inter-diffusion in cross-sectional scanning transmission electron microscopy images. Our work has demonstrated a long-sought remedy for the effective passivation of p-type InAs, paving the way to high-performance electronic and optoelectronic In As devices.
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