期刊
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
卷 127, 期 8, 页码 -出版社
SPRINGER HEIDELBERG
DOI: 10.1007/s00339-021-04726-z
关键词
Thin films; Scanning electron microscopy; Optical properties; OpenFilters
资金
- Romanian Ministry of Education and Research [PN-IIIP22.1-PED-2019-0085, 447PED/2020, 21N/2019]
This paper combines three deposition techniques to create a window material with high average transmission at oblique angles of incidence. Optical constants n and k were obtained through spectrophotometry and ellipsometry measurements. A high average transmission of over 91% in the 450-900 nm spectral range at incident angles of 20-25 degrees was achieved, with the refractive index and extinction coefficient determined by the Swanepoel method. The iterative optimization using OpenFilters software resulted in an antireflection multilayer with low reflection and high transmission, while the surface quality of films was characterized by SEM and AFM, showing compact and smooth films.
In this paper, three deposition techniques are combined to create a window material with high average transmission at oblique angles of incidence. Spectrophotometry and ellipsometry measurements, respectively, yield the optical constants n and k. In contrast with other analyses on the subject, a high average transmission, higher than 91% in the 450-900 nm spectral range, is obtained at incident angles of 20-25 degrees. The refractive index and extinction coefficient are determined by the Swanepoel method. The iterative optimization performed using the OpenFilters software leads to an antireflection (AR) multilayer with low reflection and high transmission. The surface quality of the films was characterized by scanning electron microscopy (SEM) and atomic force microscopy (AFM), which revealed compact, continuous, and smooth films.
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