期刊
ACS APPLIED ENERGY MATERIALS
卷 4, 期 5, 页码 4993-4999出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsaem.1c00550
关键词
passivating contact; poly-Si; boron; spin-on doping; TOPCon; POLO; silicon solar cells
资金
- Australian Renewable Energy Agency (ARENA) [RND016, RND017]
- Australian National Fabrication Facility (ANFF)-ACT Node
- Department of Electronic Materials Engineering, The Australian National University
- Australian Centre for Advanced Photovoltaics (ACAP)
In this study, p-type passivating contacts based on industrial poly-Si/thermal-SiOx/n-c-Si substrates were fabricated using a spin-on doping technique. The effects of drive-in temperature, drive-in dwell time, and intrinsic poly-Si thickness on boron-doped poly-Si passivating contacts were investigated. The results showed that the passivation quality improved with increasing thermal budget but decreased with excessive thermal annealing, while the thickness of the intrinsic poly-Si film had little impact on performance. After optimization, the poly-Si passivating contacts exhibited promising characteristics with an implied open-circuit voltage > 720 mV and a contact resistivity below 5 mΩ cm2.
Herein, we fabricate and characterize p-type passivating contacts based on industrial intrinsic polycrystalline silicon (poly-Si)/thermal-SiOx/n-type crystalline Si (c-Si) substrates using a spin-on doping technique. The impacts of drive-in temperature, drive-in dwell time, and intrinsic poly-Si thickness on the boron-doped poly-Si passivating contacts are investigated. First, the contact passivation quality improves with an increasing thermal budget (<950 degrees C) but then decreases again for excessive thermal annealing (>950 degrees C). Second, the thickness of the intrinsic poly-Si film shows only a little impact on the performance. After a hydrogenation treatment by depositing an AlOx/SiNx stack and subsequent annealing in forming gas, the optimized poly-Si passivating contacts show an implied open-circuit voltage (iV(oc)) > 720 mV, together with a contact resistivity (rho(c)) below 5 m Omega cm(2). These results demonstrate that boron spin-on doping is a promising alternative to the conventional BBr3 thermal diffusion for the fabrication of p-type poly-Si passivating contacts.
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