Spectral control of deterministically fabricated quantum dot waveguide systems using the quantum confined Stark effect

Quantum photonic circuits with integrated on-demand quantum emitters can act as building blocks for photonic gates and processors with enhanced quantum functionality. To scale up such quantum devices to larger and more powerful systems, eventually reaching the quantum advantage, the scalable integration of many emitters with identical emission wavelengths is of utmost importance. Here, we report on the deterministic integration of self-assembled quantum dots (QDs) in waveguide structures by means of in situ electron beam lithography (EBL). Applying external bias voltages to the p-i-n-doped and electrically contacted quantum circuits allows for spectral fine-tuning of the QDs via the quantum confined Stark effect. We achieve a tuning range of (0.40 +/- 0.16) nm, which together with a spectral pre-selection accuracy of (0.2 +/- 1.6) nm in the in situ EBL process is on average large enough to tune individual QDs into resonance. Thus, deterministic QD integration with spectral pre-selection in conjunction with Stark tuning of the QD emission wavelength is an attractive combination that has high potential to enable the scalable fabrication of integrated quantum photonic circuits in the future.

Automated summary

The deterministic integration of self-assembled quantum dots in waveguide structures has been achieved using in situ electron beam lithography. Spectral fine-tuning of the QDs has been achieved by applying external bias voltages, with the potential to enable the scalable fabrication of integrated quantum photonic circuits in the future.