4.8 Article

Micrometer-sized electrically programmable shape-memory actuators for low-power microrobotics

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SCIENCE ROBOTICS
卷 6, 期 52, 页码 -

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AMER ASSOC ADVANCEMENT SCIENCE
DOI: 10.1126/scirobotics.abe6663

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  1. Army Research Office [ARO W911NF-18-1-0032]
  2. National Science Foundation [EFMA-1935252]
  3. Cornell Center for Materials Research [DMR-1719875]
  4. Air Force Office of Scientific Research [MURI: FA9550-16-1-0031]
  5. NSF [NNCI-2025233]
  6. Kavli Institute at Cornell for Nanoscale Science

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This new class of micrometer-scale shape-memory actuators function through the electrochemical oxidation/reduction of a platinum surface, allowing for bending with the smallest radius of curvature, fast operation (<100 milliseconds), and operation within the electrochemical window of water to avoid bubble generation. These actuators have the potential to be used in adaptive microscale structures, bio-implantable devices, and microscopic robots.
Shape-memory actuators allow machines ranging from robots to medical implants to hold their form without continuous power, a feature especially advantageous for situations where these devices are untethered and power is limited. Although previous work has demonstrated shape-memory actuators using polymers, alloys, and ceramics, the need for micrometer-scale electro-shape-memory actuators remains largely unmet, especially ones that can be driven by standard electronics (similar to 1 volt). Here, we report on a new class of fast, high-curvature, low-voltage, reconfigurable, micrometer-scale shape-memory actuators. They function by the electrochemical oxidation/reduction of a platinum surface, creating a strain in the oxidized layer that causes bending. They bend to the smallest radius of curvature of any electrically controlled microactuator (similar to 500 nanometers), are fast (<100-millisecond operation), and operate inside the electrochemical window of water, avoiding bubble generation associated with oxygen evolution. We demonstrate that these shape-memory actuators can be used to create basic electrically reconfigurable microscale robot elements including actuating surfaces, origami-based three-dimensional shapes, morphing metamaterials, and mechanical memory elements. Our shape-memory actuators have the potential to enable the realization of adaptive microscale structures, bio-implantable devices, and microscopic robots.

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