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Stable Electron Concentration Si-doped β-Ga2O3 Films Homoepitaxial Growth by MOCVD

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Summary: Gallium oxide (Ga2O3) as an ultrawide bandgap semiconductor has excellent physical properties and shows promise in power electronics and deep-ultraviolet optoelectronics applications. However, understanding the defect chemistry in Ga2O3, particularly acceptor dopants and carrier compensation effects, remains a challenge. This review summarizes recent advances in investigating defect properties, carrier dynamics, and optical transitions in Ga2O3, shedding light on the microstructures and origins of defects in various forms of Ga2O3.

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