期刊
APPLIED SCIENCES-BASEL
卷 11, 期 9, 页码 -出版社
MDPI
DOI: 10.3390/app11094017
关键词
integrated; optical phased arrays; beam shaping; beam steering
类别
资金
- National Key R&D Program of China [2019YFB2203902]
- National Natural Science Foundation of China (NSFC) [61775164, 61775165]
This paper reviews the development of integrated optical phased arrays, discussing principles, building blocks, configurations, and various material platforms used. It also delves into performance parameters and typical applications, providing future perspectives at the end.
Integrated optical phased arrays can be used for beam shaping and steering with a small footprint, lightweight, high mechanical stability, low price, and high-yield, benefiting from the mature CMOS-compatible fabrication. This paper reviews the development of integrated optical phased arrays in recent years. The principles, building blocks, and configurations of integrated optical phased arrays for beam forming and steering are presented. Various material platforms can be used to build integrated optical phased arrays, e.g., silicon photonics platforms, III/V platforms, and III-V/silicon hybrid platforms. Integrated optical phased arrays can be implemented in the visible, near-infrared, and mid-infrared spectral ranges. The main performance parameters, such as field of view, beamwidth, sidelobe suppression, modulation speed, power consumption, scalability, and so on, are discussed in detail. Some of the typical applications of integrated optical phased arrays, such as free-space communication, light detection and ranging, imaging, and biological sensing, are shown, with future perspectives provided at the end.
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