期刊
MICROMACHINES
卷 12, 期 4, 页码 -出版社
MDPI
DOI: 10.3390/mi12040434
关键词
light-emitted diode; thin-film transistor; photosensor; spectrometer; optical inspection
This study investigates the use of LED light sources in thin-film transistors, with results showing that white and blue LED light sources perform well in optical inspection, especially with the blue LED demonstrating superior performance.
This paper explores the effectiveness of the white, red, green, and blue light emitted diodes (LEDs) light sources to detect the third layer of the electrode pixel and the fourth layer of the via-hole passivation on thin-film transistors. The time-delay-integration charge-coupled device and a reflective spectrometer were implemented in this experiment. The optical conditions are the same, as each light source and the digital image's binary method also recognize the sharpness and contrast in the task. Consequently, the white and the blue LED light sources can be candidates for the light source for the optical inspection, especially for monochromic blue LED's outperformance among the light sources. The blue LED demonstrates the high spatial resolution and short wavelength's greater energy to trigger the photosensor. Additionally, the metal material has shown a tremendous responsibility in the photosensor with 150 Dn/nj/cm(2) over the sensibility. The mercury Hg-198-pencil discharge lamp emits the stable spectral wavelength to significantly calibrate the spectrometer's measurement.
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