期刊
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
卷 10, 期 5, 页码 -出版社
ELECTROCHEMICAL SOC INC
DOI: 10.1149/2162-8777/abfa2b
关键词
-
资金
- Ministry of Science and Technology, Taiwan, Republic of China [MOST107-2112-M-019-001-MY3, MOST 109-2221-E-260-008-MY1]
A series of beta-Ga2O3 films were prepared using TEGa and N2O as precursors to investigate the impact of N2O/TEGa ratio. The study found that increasing the N2O/TEGa ratio can suppress oxygen vacancies in beta-Ga2O3 films and significantly improve device performance. This research provides insight into the influence of TEGa/N2O ratio on the quality, surface morphology, chemical composition, and device performance of UV PDs.
In this study, a series of beta-Ga2O3 films are prepared by using triethylgallium (TEGa) and nitrous oxide (N2O) as precursors to explore the effect of N2O/TEGa ratio on the characteristics of beta-Ga2O3 films. A metal/semiconductor/metal (MSM)-type solar blind ultraviolet (UV) photodetector (PD) is fabricated using as-prepared beta-Ga2O3 film. It is found that an increment of N2O/TEGa ratio tends to suppress the oxygen vacancies in beta-Ga2O3 film so the device performance can be significantly improved. This work gives a deep insight into the impact of TEGa/N2O ratio for depositing beta-Ga2O3 on the film quality, the surface morphology, the chemical composition and the device performance for UV PDs.
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