Towards a Highly Sensitive Piezoelectric Nano-Mass Detection-A Model-Based Concept Study

The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established.

Automated summary

This paper presents a novel approach for a co-resonant mass detector, addressing the challenge of detecting exceedingly small masses while simplifying setup and improving sensitivity. By combining longitudinal and bending vibrations and integrating an aluminum nitride piezoelectric element for excitation and sensing, the feasibility of the concept is demonstrated and shown to be a promising approach for future nano-mass detectors.