Racetrack microresonator based electro-optic phase shifters on a 3C silicon-carbide-on-insulator platform

We report, to the best of our knowledge, the first demonstration of integrated electro-optic (EO) phase shifters based on racetrack microresonators on a 3C silicon-carbide-on-insulator (SiCOI) platform working at near-infrared wavelengths. By applying DC voltage in the crystalline axis perpendicular to the waveguide plane, we have observed optical phase shifts from the racetrack microresonators whose loaded quality (Q) factors are similar to 30,000. We show voltage-length product (V-pi center dot L-pi) of 118 V.cm, which corresponds to an EO coefficient r(41) of 2.6 pm/V. The SiCOI platform can be used to realize tunable silicon carbide integrated photonic devices that are desirable for applications in nonlinear and quantum photonics over a wide bandwidth that covers visible and infrared wavelengths. (C) 2021 Optical Society of America

Automated summary

This study demonstrates integrated electro-optic phase shifters based on 3C silicon-carbide-on-insulator platform operating at near-infrared wavelengths, showing optical performance and electro-optic coefficient. The SiCOI platform can be utilized for tunable silicon carbide integrated photonic devices suitable for nonlinear and quantum photonics applications.