期刊
OPTICS EXPRESS
卷 29, 期 12, 页码 18010-18025出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.426989
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资金
- West Light Foundation of the Chinese Academy of Sciences [XAB2015A09]
- Research Fund for Young Star of Science and Technology in Shaanxi Province [2016KJXX-08]
- China Scholarship Council
A variable curvature mirror (VCM) for zoom-imaging systems was investigated with a cycloid-like structure, showing a good correlation between analytical solution and finite-element analysis. The VCM was manufactured and tested under air pressure actuation, demonstrating excellent performance in maintaining surface quality under different conditions.
A cycloid-like variable curvature mirror (VCM) for zoom-imaging systems was investigated. An analytical-deformation solution to a thin-elastic plate with a cycloid-like thickness distribution and simply supported boundary condition under uniform pressure was found using a small parameter method. The finite-element analysis of the thin-elastic plate and designed VCM showed a good correlation with the analytical solution. The VCM was manufactured and polished to the initial shape with a root mean square (RMS) of 1/80 lambda. Finally, with air-pressure-based actuation testing under 0.07 MPa, the VCM deforms approximately 36.89 mu m and maintains the RMS surface performance of 1/10 lambda, 1/40 lambda with and without spherical aberrations, respectively. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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