The degradation of CVD-grown MoS2 domains in atmospheric environment

The stability of two-dimensional transition metal chalcogenides (TMDCs) is important for their reliable device applications in nanoelectronics and optoelectronics. Here, we report the degradation of MoS2 grown by chemical vapor deposition (CVD) in atmospheric environment. Through high-pressure treatment and water immersion of molybdenum disulfide (MoS2) samples, we found that moistures will permeate into the interface between MoS2 and sapphire to accelerate oxidation. Therefore, isolating oxygen and moistures is beneficial to improve the long-term stability of TMDCs. Our study deepens the understanding of MoS2 degradation process and provides an important basis for the stability improvement of TMDCs. (C) 2021 Published by Elsevier B.V.

Automated summary

The study reports the degradation of MoS2 grown by CVD in atmospheric environment, showing that moisture accelerates oxidation of MoS2. Isolating oxygen and moisture is beneficial for improving the long-term stability of TMDCs.