4.7 Article

Activation energies for crystallization of manganese-doped (K,Na)NbO3 thin films deposited from a chemical solution

期刊

JOURNAL OF THE AMERICAN CERAMIC SOCIETY
卷 104, 期 10, 页码 4968-4976

出版社

WILEY
DOI: 10.1111/jace.17915

关键词

films; growth; KNN; nucleation

资金

  1. Center for Nanoscale Science and Technology, National Science Foundation [DMR-1420620, DMR-2011839]

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This study investigates the activation energies for KNN thin films with manganese doping, revealing that crystallization is nucleation-limited and can be reduced by using a seed layer.
Potassium sodium niobate (KNN) thin films are potentially useful for energy harvesting devices and for lead-free piezoelectric microelectromechanical systems. This work reports the activation energies for nucleation, growth and perovskite phase transformation from a 0.5% manganese-doped KNN 2-methoxyethanol-based solution modified with acetylacetone and excess alkali precursors. The films were annealed in a rapid thermal processor (RTP) with a hold step at temperatures from 500 to 550 degrees C. The activation energies for perovskite transformation and growth, determined by electron micrograph observation, were 687 +/- 13 and 194 +/- 10 kJ/mol. The activation energy for nucleation was 341 +/- 20 kJ/mol. Based on these data, crystallization in KNN is found to be nucleation-limited; thus, it should be possible to reduce the crystallization temperature by utilizing a seed layer which provides nucleation sites, provided the organics are removed from the film.

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