Design, Optimization, and Realization of a High Performance MOEMS Accelerometer From a Double-Device-Layer SOI Wafer (vol 26, pg 859, 2017)

In the above article [1], the content of this article remains untouched. Only Table III is rectified. The stiffness of the proposed MOEMS accelerometer listed in Table III should be half of that value, which is 0.56 N/m.

Automated summary

The content of the article remains unchanged, with only the data of the MOEMS accelerometer listed in Table III being corrected.