4.7 Article

Thermal-assisted brush printing of water-based In-Ga-Zn oxide transistors

期刊

JOURNAL OF ALLOYS AND COMPOUNDS
卷 862, 期 -, 页码 -

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.jallcom.2020.158001

关键词

In-Ga-Zn oxide; Thermal-annealing; Brush printing; Thin-film transistor

资金

  1. Science and Technology Commission of Shanghai Municipality [19JC1410600, 20S10601]
  2. Program for Professor of Special Appointment (Eastern Scholar) at Shanghai Institutions of Higher Learning
  3. Natural Science Foundation of Shanghai [19ZR1470900]
  4. Fundamental Research Funds for the Central Universities

向作者/读者索取更多资源

The water-based solution process is an environmentally friendly technique that has attracted significant attention. A thermal-assisted brush printing method has been demonstrated for fabricating oxide semiconductor films for transistors, showing improved transistor properties. The synergistic effects of thermal-annealing and brush printing have been comprehensively investigated to understand the acceleration of precursor solvent evaporation and promotion of lower surface roughness in thin-films.
As an environment-friendly technique, the water-based solution process has attracted numerous attention. Due to the ability to fabricate oxide semiconductor films for transistors with acceptable electric properties at relatively low temperatures (similar to 200 degrees C lower compared with organic solvent), it has great potential in future display technology, and various correlation technologies are keeping emerging. Here, an efficient and facile water route thermal-assisted brush printing is demonstrated, which can be applied to fabricate the semiconductor layer of indium gallium zinc oxide (IGZO) thin-film transistors (TFTs) by the solution process. The synergistic effects of thermal-annealing and brush printing on the film formation process were comprehensively investigated, implying the synergistic effects induce the acceleration of the evaporation of the precursor solvent and promotes the lower surface roughness of as-prepared thin-film, resulting in improved transistor properties. Mechanically, the proposed film-forming model of thermal-assisted brush printing is also elaborated, which is expected to be a general guideline for the solution processing of metal-oxide semiconductor thin-films. (C) 2020 Elsevier B.V. All rights reserved.

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