期刊
JAPANESE JOURNAL OF APPLIED PHYSICS
卷 60, 期 5, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.35848/1347-4065/abf36d
关键词
A damage-free substrate; Sacrificial Layer; Wet undercut etching; Substrate removal technique; Flip-Chip Laser Diodes; Strain relaxation; n-type semipolar GaN surface
资金
- King Abdulaziz City for Science and Technology (KACST) Technology Innovations Center (TIC) program
- KACST-KAUST-UCSB Solid State Lighting Program
- Solid State Lighting and Energy Electronics Center (SSLEEC) at UCSB
- NSF MRSEC program [DMR1121053, ECS-0335765]
A damage-free substrate removal technique using photoelectrochemical etching (PECE) was applied in semipolar (2021) flip-chip laser diode (FC-LD) structures by incorporating sacrificial layer In0.12Ga0.88N single quantum well (SL-SQW) types. While 40 nm type I required processing under low-temperature KOH for developing high-quality green active region devices, 10 nm type II exhibited a smooth n-type GaN surface with room-temperature KOH, promoting the applicability of the proposed technique. Temperature-dependent PECE of SL-SQW types is crucial for advanced FC-LDs.
We applied a damage-free substrate removal technique using photoelectrochemical etching (PECE) by incorporating sacrificial layer In0.12Ga0.88N single quantum well (SL-SQW) types in semipolar (2021 ) flip-chip laser diode (FC-LD) structures. Although 40 nm type I promoted the development of high-quality green active region devices in terms of managing strain relaxation, processing was required under low-temperature KOH. However, 10 nm type II exhibited a smooth n-type GaN surface with room-temperature KOH, thereby promoting the applicability of the proposed technique for either a short light emitter or a combination with type I. The temperature-dependent PECE of SL-SQW types is important in realizing advanced FC-LDs. (c) 2021 The Japan Society of Applied Physics
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据