期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 68, 期 4, 页码 1454-1460出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2021.3061025
关键词
Bulk CMOS technology; high temperature anneal; hot-carrier (HC) degradation; poly-Si heater; recovery; Si-H bond
资金
- Research Foundation-Flanders (Belgium) [11A3621N]
- Austrian Science Fund (FWF) [P31204-N30]
- Austrian Science Fund (FWF) [P31204] Funding Source: Austrian Science Fund (FWF)
This study presents measurements of multiple hot-carrier stress and high-temperature anneal cycles on the same nFETs in a commercial 40-nm bulk CMOS technology. It models the degradation anneal process assuming Si-H bond breakage during stress and bond passivation during anneal, with the bond dissociation and passivation energies following a bivariate Gaussian distribution. The research finds no correlation between bond dissociation and passivation energies, and notes that repeated HC stress and anneal cycles change the shape of the distribution of bond passivation energies from Gaussian to non-Gaussian.
We report measurements of multiple hot-carrier (HC) stress and high-temperature anneal cycles repeated on the same nFETs fabricated in a commercial 40-nm bulk CMOS technology. We model this cycled HC degradation anneal assuming Si-H bond breakage during stress and bond passivation during anneal, with the bond dissociation and passivation energies following a bivariate Gaussian distribution. Our model can describe multiple stress and anneal time scenarios well using a single parameter set and provides insights into the recovery behavior of HC-induced defects. We find no correlation between bond dissociation and passivation energies and observe that the repeated HC stress and anneal cycles suppress the low energies from the distribution of bond passivation energies, changing its shape from the Gaussian to a non-Gaussian form.
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